IndiumV3, Main, Repository, bibRecord, 003296

Comparison of different dispersion models for single layer optical thin film index determination

Identifieur interne : 003296 ( Main/Repository ); précédent : 003295; suivant : 003297

Comparison of different dispersion models for single layer optical thin film index determination

Auteurs : RBID : Pascal:12-0103725

Descripteurs français

Pascal (Inist)
- Dispersion, Structure lamellaire, Propriété optique, Rayonnement IR proche, Indice réfraction, Facteur réflexion, Spectre réflexion, Facteur transmission, Matériau diélectrique, Diélectrique, Semiconducteur, Optimisation, Donnée expérimentale, Couche mince, Oxyde de tantale, Silicium, Oxyde d'indium, Oxyde d'étain, Or, Ta2O5, Si, 7866, 7784.
Wicri :
- concept : Or.

English descriptors

KwdEn :
- Dielectric materials, Dispersions, Experimental data, Gold, Indium oxide, Lamellar structure, Near infrared radiation, Optical properties, Optimization, Reflection spectrum, Reflectivity, Refractive index, Semiconductor materials, Silicon, Tantalum oxide, Thin films, Tin oxide, Transmittance.

Abstract

We here determine the optical properties of different single-layer thin films containing Ta₂O₅, Si, Indium Tin Oxide and Au in the ultraviolet-visible and near infrared ranges. More specifically, we deduce the complex refractive index and thickness from the reflectance and transmittance measured using a spectrophotometer at normal incidence. One major difficulty is to find an appropriate selection of dispersion laws for various types of material (dielectric, semiconductors, and metals). For this purpose, a number of models have been investigated from a theoretical point of view in consideration of the Kramers-Kronig relation. These include the Forouhi-Bloomer model, combined with the modified Drude, Tauc-Lorentz and multiple-oscillator Tauc-Lorentz models. A global optimization procedure had to be employed because of the large number of parameters (from 3 to 15) required to describe the optical dispersion laws. The calculated reflectance and transmittance are in good agreement with experimental data and the complex refractive index is consistent with our knowledge and that already reported.

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Pascal:12-0103725

Le document en format XML

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<author><name>LIHONG GAO</name>
<affiliation wicri:level="3"><inist:fA14 i1="01"><s1>Institute Fresnel, UMR 6133 CNRS, Campus de St Jérôme</s1>
<s2>13397 Marseille</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
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<country>France</country>
<placeName><region type="region" nuts="2">Provence-Alpes-Côte d'Azur</region>
<settlement type="city">Marseille</settlement>
</placeName>
</affiliation>
</author>
<author><name sortKey="Lemarchand, Fabien" uniqKey="Lemarchand F">Fabien Lemarchand</name>
<affiliation wicri:level="3"><inist:fA14 i1="01"><s1>Institute Fresnel, UMR 6133 CNRS, Campus de St Jérôme</s1>
<s2>13397 Marseille</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
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<country>France</country>
<placeName><region type="region" nuts="2">Provence-Alpes-Côte d'Azur</region>
<settlement type="city">Marseille</settlement>
</placeName>
</affiliation>
</author>
<author><name sortKey="Lequime, Michel" uniqKey="Lequime M">Michel Lequime</name>
<affiliation wicri:level="3"><inist:fA14 i1="01"><s1>Institute Fresnel, UMR 6133 CNRS, Campus de St Jérôme</s1>
<s2>13397 Marseille</s2>
<s3>FRA</s3>
<sZ>1 aut.</sZ>
<sZ>2 aut.</sZ>
<sZ>3 aut.</sZ>
</inist:fA14>
<country>France</country>
<placeName><region type="region" nuts="2">Provence-Alpes-Côte d'Azur</region>
<settlement type="city">Marseille</settlement>
</placeName>
</affiliation>
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<publicationStmt><idno type="inist">12-0103725</idno>
<date when="2011">2011</date>
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<title level="j" type="abbreviated">Thin solid films</title>
<title level="j" type="main">Thin solid films</title>
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</fileDesc>
<profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Dielectric materials</term>
<term>Dispersions</term>
<term>Experimental data</term>
<term>Gold</term>
<term>Indium oxide</term>
<term>Lamellar structure</term>
<term>Near infrared radiation</term>
<term>Optical properties</term>
<term>Optimization</term>
<term>Reflection spectrum</term>
<term>Reflectivity</term>
<term>Refractive index</term>
<term>Semiconductor materials</term>
<term>Silicon</term>
<term>Tantalum oxide</term>
<term>Thin films</term>
<term>Tin oxide</term>
<term>Transmittance</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr"><term>Dispersion</term>
<term>Structure lamellaire</term>
<term>Propriété optique</term>
<term>Rayonnement IR proche</term>
<term>Indice réfraction</term>
<term>Facteur réflexion</term>
<term>Spectre réflexion</term>
<term>Facteur transmission</term>
<term>Matériau diélectrique</term>
<term>Diélectrique</term>
<term>Semiconducteur</term>
<term>Optimisation</term>
<term>Donnée expérimentale</term>
<term>Couche mince</term>
<term>Oxyde de tantale</term>
<term>Silicium</term>
<term>Oxyde d'indium</term>
<term>Oxyde d'étain</term>
<term>Or</term>
<term>Ta2O5</term>
<term>Si</term>
<term>7866</term>
<term>7784</term>
</keywords>
<keywords scheme="Wicri" type="concept" xml:lang="fr"><term>Or</term>
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<front><div type="abstract" xml:lang="en">We here determine the optical properties of different single-layer thin films containing Ta<sub>2</sub>
O<sub>5</sub>
, Si, Indium Tin Oxide and Au in the ultraviolet-visible and near infrared ranges. More specifically, we deduce the complex refractive index and thickness from the reflectance and transmittance measured using a spectrophotometer at normal incidence. One major difficulty is to find an appropriate selection of dispersion laws for various types of material (dielectric, semiconductors, and metals). For this purpose, a number of models have been investigated from a theoretical point of view in consideration of the Kramers-Kronig relation. These include the Forouhi-Bloomer model, combined with the modified Drude, Tauc-Lorentz and multiple-oscillator Tauc-Lorentz models. A global optimization procedure had to be employed because of the large number of parameters (from 3 to 15) required to describe the optical dispersion laws. The calculated reflectance and transmittance are in good agreement with experimental data and the complex refractive index is consistent with our knowledge and that already reported.</div>
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<fA11 i1="01" i2="1"><s1>LIHONG GAO</s1>
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<fA14 i1="01"><s1>Institute Fresnel, UMR 6133 CNRS, Campus de St Jérôme</s1>
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<fC01 i1="01" l="ENG"><s0>We here determine the optical properties of different single-layer thin films containing Ta<sub>2</sub>
O<sub>5</sub>
, Si, Indium Tin Oxide and Au in the ultraviolet-visible and near infrared ranges. More specifically, we deduce the complex refractive index and thickness from the reflectance and transmittance measured using a spectrophotometer at normal incidence. One major difficulty is to find an appropriate selection of dispersion laws for various types of material (dielectric, semiconductors, and metals). For this purpose, a number of models have been investigated from a theoretical point of view in consideration of the Kramers-Kronig relation. These include the Forouhi-Bloomer model, combined with the modified Drude, Tauc-Lorentz and multiple-oscillator Tauc-Lorentz models. A global optimization procedure had to be employed because of the large number of parameters (from 3 to 15) required to describe the optical dispersion laws. The calculated reflectance and transmittance are in good agreement with experimental data and the complex refractive index is consistent with our knowledge and that already reported.</s0>
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Comparison of different dispersion models for single layer optical thin film index determination

Comparison of different dispersion models for single layer optical thin film index determination

Descripteurs français

English descriptors

Abstract

Links toward previous steps (curation, corpus...)

Links to Exploration step

Le document en format XML

Pour manipuler ce document sous Unix (Dilib)

Pour mettre un lien sur cette page dans le réseau Wicri